Tiku, Shiban
III-V integrated circuit fabrication technology Shiban Tiku, Dhrubes Biswas - Singapore : Pan Stanford Publishing, c2016. - xxv, 687 p. : ill. ; 24 cm.
Other Titles: Three-five integrated circuit fabrication technology 3-5 integrated circuit fabrication technology
1. Semiconductor basics -- 2. GaAs devices -- 3. Phase diagrams and crystal growth of compound semiconductors -- 4. Epitaxy -- 5. Photolithography -- 6. Wet etching, cleaning, and passivation -- 7. Plasma processing and dry etching -- 8. Deposition processes -- 9. Ion implantation and device isolation -- 10. Diffusion in III-V compound semiconductors -- 11. Ohmic contacts -- 12. Schottky diodes and FET processing -- 13. HEMT process -- 14. HBT processing -- 15. BiFET and BiHEMT processing -- 16. MOSFET processing -- 17. Passive components -- 18. Interconnect technology -- 19. Backend processing and through-wafer vias -- 20. Electroplating -- 21. Measurements and characterization -- 22. Reliability -- 23. GaN devices -- 24. RF MEMS.
Tiku and Biswas present a desk reference for practicing engineers and graduate students new to the field of III-V semiconductor integrated circuit processing. He specifically addresses the needs of students who know semiconductor theory but lack detailed processing knowledge. The topics include GaAs devices, phase diagrams and crystal growth of compound semiconductors, plasma processing and dry etching, Schottky diodes and field-effect transistor processing, backend processing and through-wafer vias, and radio frequency microelectromechanical systems. Distributed by CRC Press, A Taylor & Francis Group member. Annotation ©2016 Ringgold, Inc., Portland, OR (protoview.com)
978-9814669306
Compound semiconductors
Integrated circuits
III-V integrated circuit fabrication technology Shiban Tiku, Dhrubes Biswas - Singapore : Pan Stanford Publishing, c2016. - xxv, 687 p. : ill. ; 24 cm.
Other Titles: Three-five integrated circuit fabrication technology 3-5 integrated circuit fabrication technology
1. Semiconductor basics -- 2. GaAs devices -- 3. Phase diagrams and crystal growth of compound semiconductors -- 4. Epitaxy -- 5. Photolithography -- 6. Wet etching, cleaning, and passivation -- 7. Plasma processing and dry etching -- 8. Deposition processes -- 9. Ion implantation and device isolation -- 10. Diffusion in III-V compound semiconductors -- 11. Ohmic contacts -- 12. Schottky diodes and FET processing -- 13. HEMT process -- 14. HBT processing -- 15. BiFET and BiHEMT processing -- 16. MOSFET processing -- 17. Passive components -- 18. Interconnect technology -- 19. Backend processing and through-wafer vias -- 20. Electroplating -- 21. Measurements and characterization -- 22. Reliability -- 23. GaN devices -- 24. RF MEMS.
Tiku and Biswas present a desk reference for practicing engineers and graduate students new to the field of III-V semiconductor integrated circuit processing. He specifically addresses the needs of students who know semiconductor theory but lack detailed processing knowledge. The topics include GaAs devices, phase diagrams and crystal growth of compound semiconductors, plasma processing and dry etching, Schottky diodes and field-effect transistor processing, backend processing and through-wafer vias, and radio frequency microelectromechanical systems. Distributed by CRC Press, A Taylor & Francis Group member. Annotation ©2016 Ringgold, Inc., Portland, OR (protoview.com)
978-9814669306
Compound semiconductors
Integrated circuits