Mechanics of microsystems
By: Corigliano, Alberto
Title By: Ardito, Raffaele | Comi, Claudia | Frangi, Attilio | Ghisi, Aldo | Mariani, Stefano
Material type:
BookSeries: Microsystem and nanotechnology series ; 7646.Publisher: UK : John Wiley, c2018.Description: xxiii, 397 p. : ill. ; 26 cm.ISBN: 9781119053835Subject(s): Microelectromechanical systemsDDC classification: 621.381 CO ME Online resources: Location Map | Item type | Home library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
| REGULAR | University of Wollongong in Dubai Main Collection | 621.381 CO ME (Browse shelf) | Available | may2018 | T0059463 |
, Shelving location: Main Collection Close shelf browser
|
|
|
|
|
|
|
||
| 621.38 TI ME Time frequency signal analysis and processing : | 621.38043 CA CO Communication systems : | 621.38043 CA CO Communication systems : | 621.381 CO ME Mechanics of microsystems | 621.381 EL EC Electronics, electrical engineering and information science : | 621.381 EL EC Electrical, control engineering and computer science : | 621.381 FE EL Electronic devices : |
Includes bibliographical references and index.
Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a design for reliability point of view and includes examples of applications in industry.
Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro–scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.