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Mechanics of microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi, Stefano Mariani

By: Contributor(s): Material type: TextTextSeries: Microsystem and nanotechnology series ; 7646Publication details: UK : John Wiley, c2018.Description: xxiii, 397 p. : ill. ; 26 cmISBN:
  • 9781119053835
Subject(s): DDC classification:
  • 621.381 CO ME
Online resources: Summary: Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a design for reliability point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro–scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.
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Holdings
Item type Current library Call number Status Notes Date due Barcode
REGULAR University of Wollongong in Dubai Main Collection 621.381 CO ME (Browse shelf(Opens below)) Available may2018 T0059463

Includes bibliographical references and index.

Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a design for reliability point of view and includes examples of applications in industry.

Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro–scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.

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