III-V integrated circuit fabrication technology
By: Tiku, Shiban
Title By: Biswas, Dhrubes
Material type:
BookPublisher: Singapore : Pan Stanford Publishing, c2016.Description: xxv, 687 p. : ill. ; 24 cm.ISBN: 978-9814669306Subject(s): Compound semiconductors | Integrated circuitsDDC classification: . Online resources: Location Map | Item type | Home library | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|
| REGULAR | University of Wollongong in Dubai Main Collection | 621.3815 IN TE (Browse shelf) | Available | T0054761 |
, Shelving location: Main Collection Close shelf browser
|
|
|
|
|
|
|
||
| 621.3815 FL EN An engineering approach to digital design | 621.3815 FL EN An engineering approach to digital design | 621.3815 GO BA Basic circuit analysis for electrical engineering | 621.3815 IN TE III-V integrated circuit fabrication technology | 621.3815 IR EN Engineering circuit analysis | 621.3815 MI XE Mixed-signal circuits | 621.3815 NA EL Electric circuits / |
Other Titles: Three-five integrated circuit fabrication technology 3-5 integrated circuit fabrication technology
1. Semiconductor basics -- 2. GaAs devices -- 3. Phase diagrams and crystal growth of compound semiconductors -- 4. Epitaxy -- 5. Photolithography -- 6. Wet etching, cleaning, and passivation -- 7. Plasma processing and dry etching -- 8. Deposition processes -- 9. Ion implantation and device isolation -- 10. Diffusion in III-V compound semiconductors -- 11. Ohmic contacts -- 12. Schottky diodes and FET processing -- 13. HEMT process -- 14. HBT processing -- 15. BiFET and BiHEMT processing -- 16. MOSFET processing -- 17. Passive components -- 18. Interconnect technology -- 19. Backend processing and through-wafer vias -- 20. Electroplating -- 21. Measurements and characterization -- 22. Reliability -- 23. GaN devices -- 24. RF MEMS.
Tiku and Biswas present a desk reference for practicing engineers and graduate students new to the field of III-V semiconductor integrated circuit processing. He specifically addresses the needs of students who know semiconductor theory but lack detailed processing knowledge. The topics include GaAs devices, phase diagrams and crystal growth of compound semiconductors, plasma processing and dry etching, Schottky diodes and field-effect transistor processing, backend processing and through-wafer vias, and radio frequency microelectromechanical systems. Distributed by CRC Press, A Taylor & Francis Group member. Annotation ©2016 Ringgold, Inc., Portland, OR (protoview.com)